Turbomolecular pump

ATH 400M, ATH1300M ,ATH1600M,ATH2300M

300~2100 l/s pumping speed design

Brand new maglev five-way horizontal & N2 purge & Heater design

Applicable to PVD, CVD, Etch processes

High exhaust pressure up to 40 mbar

Product Advantages:

Exquisite design, can be installed at any angle l High efficiency, energy saving and low power
High compression ratio, up to > 1 x 1011
Composite bearing (semi-magnetic levitation type), sturdy and durable
Long life and high reliability
The ultimate pressure can reach 5*10-10 mbar (CF flange)
The specifications and sizes are complete, and the air extraction rate covers the range: 67 ~ 685 L/s, which can meet different usage needs.

National University Physics Laboratory, National Synchrotron Radiation Research Center, Academia Sinica, etc., designated purchase models.