Pfeiffer Vacuum

• Durable and reliable
• Compact size, does not take up space
• Power saving, low noise, low vibration
• Ideal for load-lock, transfer chambers or R&D applications

Main application industries:

• Semiconductor industry
• Panel industry
• Continuous vacuum coating industry
• Solar power industry
• Light emitting diode industry
• Biotechnology Pharmaceutical Industry

• Compact high performance pumping station for all high and ultrahigh vacuum applications
• Plug and play solution with HiPace 80 turbopump and multistage diaphragm pump MVP 015-4
• Intermittent mode adapts the pumping station to the process conditions and saves up to 90 % energy
• Easy integration of pressure gauges from the accessories

Product Advantages:

• Exquisite design, can be installed at any angle l High efficiency, energy saving and low power
• High compression ratio, up to > 1 x 1011
• Composite bearing (semi-magnetic levitation type), sturdy and durable
• Long life and high reliability
• The ultimate pressure can reach 5*10-10 mbar (CF flange)
• The specifications and sizes are complete, and the air extraction rate covers the range: 67 ~ 685 L/s, which can meet different usage needs.

National University Physics Laboratory, National Synchrotron Radiation Research Center, Academia Sinica, etc., designated purchase models.

• Measuring range 760 to 5 · 10-4 Torr
• Lightweight and sturdy
• Fast response and stable
• Can be installed in any direction
• Maximum pressure for inert gases

The Pfeiffer all-area vacuum gauge PKR 251 uses the inverted magnetron principle with built-in Pyrene and cold cathode (anode rod),
Vacuum measuring range 1E-9 to 1000 hPa
Output analog signal 0-10V, can be connected to PLC, suitable for all vacuum applications
Used together with German Pfeiffer vacuum gauge displays TPG 361 and TPG 362.