dry vacuum pump

Main application industries:

• Semiconductor industry
• Panel industry
• Continuous vacuum coating industry
• Solar power industry
• Light emitting diode industry
• Biotechnology Pharmaceutical Industry

• Durable and reliable
• Compact size, does not take up space
• Power saving, low noise, low vibration
• Ideal for load-lock, transfer chambers or R&D applications

No oil, gas and dust generated
Pumping rate: 112 m3/h
Ultimate pressure: 1.5 × 10-2 mbar

Low energy consumption and high reliability
Suitable for semiconductor and harsh manufacturing processes
Pumping rate: 112~1700 m3/h
Ultimate pressure: 6 × 10-3 mbar