Drytel Series
Drytel 1025
7.5~30 l/s pumping system
They can be used in various types ofapplications:
- Backing of turbomolecular pumps
- Loadlock pumping
- Mass spectrometry
- Surface analysis
- Ion pump evacuation
- Cryopump regeneration
- Calibration
- Gas industry
- Gas lines
| Type | Exhaust flange | Extraction efficiency for N2 | Pre-amp |
| Dry 1025 | ISO 63 | 7.5 l/s | 4 m3/h |
Dry pumping units
The Drytel series of products are dry pumping systems that include an Adixen molecular drag pump (MDP) or a hybridturbo pump (ATH) and an oil-free forepump. Designed to be used on a bench top or easilyintegrated into a system,these units provide a dry, clean vacuum from atmosphere to 10-8 mbar (Torr).
Recommend
adixen ACP 15/28/40
Main application industries:
- Semiconductor industry
- Panel industry
- Continuous vacuum coating industry
- Solar power industry
- Light emitting diode industry
- Biotechnology Pharmaceutical Industry
Roots Vacuum Pump Air Extraction System
With various pre-pumps, the working range can be extended to medium vacuum or even high vacuum areas.
Greater pumping rates are achieved at low pressures.
Pumping rate: 150~300~600~1000~2000 m3/h
ATH-M Series
ATH 400M, ATH1300M ,ATH1600M,ATH2300M
300~2100 l/s pumping speed design
Brand new maglev five-way horizontal & N2 purge & Heater design
Applicable to PVD, CVD, Etch processes
ADP ADS SERIES TWO
Low energy consumption and high reliability
Suitable for semiconductor and harsh manufacturing processes
Pumping rate: 112~1700 m3/h
Ultimate pressure: 6 × 10-3 mbar