ATH-M Series
ATH 400M, ATH1300M ,ATH1600M,ATH2300M
300~2100 l/s pumping speed design
Brand new maglev five-way horizontal & N2 purge & Heater design
Applicable to PVD, CVD, Etch processes
- Glass coating,
- Micro systems machining,
- Ion beam rectification,
- Electron microscopy,
- Space simulation chambers,
- Particle accelerators,
- Semiconductor processes (etch, CVD, ion implant),
- Coating and thin films deposition,
- Ion milling
- And many R&D experiments
| Type | Exhaust flange | Extraction efficiency for N2 | Installation direction |
| ATH 400M | ISO 100/160 | 410 l/s | Any |
| ATH 1300M | ISO 160/200 | 1250 l/s | Any |
| ATH 1600M | ISO 200/250 | 1500 l/s | Any |
| ATH 2300M | ISO 250 | 2100 l/s | Any |
Recommend
ALCATEL 2015SD / 2021SD Vacuum Pump
ALCATEL / ADIXEN 2015SD 2021SD - New products in stock, project promotion in progress
ALCATEL 2015SD Oil vacuum pump
New products in stock—on sale
- Models: 2005SD, 2010SD, 2015SD, 2021SD.
- Pump pumping rate: 100 l/min, 200 l/min, 300 l/min, 400l/min.
- Ultimate pressure: 5 X 10-3 mbar/Torr. ISO-KF NW25 Inlet Flange
- Used in vacuum ovens, glove boxes, mass spectrometers, electron microscopes, and physical and chemical instruments.
- Academic units: Recommended by Academia Sinica, National Taiwan University, Tsinghua University, and Jiaotong University.
- Easy to operate, one-way moving motor, 110V/220V switch, humanized design.
adixen ACP 15/28/40
Main application industries:
- Semiconductor industry
- Panel industry
- Continuous vacuum coating industry
- Solar power industry
- Light emitting diode industry
- Biotechnology Pharmaceutical Industry
Roots Vacuum Pump Air Extraction System
With various pre-pumps, the working range can be extended to medium vacuum or even high vacuum areas.
Greater pumping rates are achieved at low pressures.
Pumping rate: 150~300~600~1000~2000 m3/h
Rotary Vane Pumps
Adixen - Pascal Series
adixen Vacuum Products have committed 30 years of experience in Product Design and Manufacturing to meet industry requirements for High Performance, Quality, and Reliability ... and the result is their famous Pascal Range of Rotary Vane Pumps.
ADP ADS SERIES TWO
Low energy consumption and high reliability
Suitable for semiconductor and harsh manufacturing processes
Pumping rate: 112~1700 m3/h
Ultimate pressure: 6 × 10-3 mbar