ATH-M Series
ATH 400M, ATH1300M ,ATH1600M,ATH2300M
300~2100 l/s pumping speed design
Brand new maglev five-way horizontal & N2 purge & Heater design
Applicable to PVD, CVD, Etch processes
- Glass coating,
- Micro systems machining,
- Ion beam rectification,
- Electron microscopy,
- Space simulation chambers,
- Particle accelerators,
- Semiconductor processes (etch, CVD, ion implant),
- Coating and thin films deposition,
- Ion milling
- And many R&D experiments
| Type | Exhaust flange | Extraction efficiency for N2 | Installation direction |
| ATH 400M | ISO 100/160 | 410 l/s | Any |
| ATH 1300M | ISO 160/200 | 1250 l/s | Any |
| ATH 1600M | ISO 200/250 | 1500 l/s | Any |
| ATH 2300M | ISO 250 | 2100 l/s | Any |
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adixen ACP 15/28/40
Main application industries:
- Semiconductor industry
- Panel industry
- Continuous vacuum coating industry
- Solar power industry
- Light emitting diode industry
- Biotechnology Pharmaceutical Industry
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Roots Vacuum Pump Air Extraction System
With various pre-pumps, the working range can be extended to medium vacuum or even high vacuum areas.
Greater pumping rates are achieved at low pressures.
Pumping rate: 150~300~600~1000~2000 m3/h
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Rotary Vane Pumps
Adixen - Pascal Series
adixen Vacuum Products have committed 30 years of experience in Product Design and Manufacturing to meet industry requirements for High Performance, Quality, and Reliability ... and the result is their famous Pascal Range of Rotary Vane Pumps.