ATH-M Series

ATH 400M, ATH1300M ,ATH1600M,ATH2300M

300~2100 l/s pumping speed design

Brand new maglev five-way horizontal & N2 purge & Heater design

Applicable to PVD, CVD, Etch processes

Application
Specifications

Glass coating,
Micro systems machining,
Ion beam rectification,
Electron microscopy,
Space simulation chambers,
Particle accelerators,
Semiconductor processes (etch, CVD, ion implant),
Coating and thin films deposition,
Ion milling
And many R&D experiments

Type	Exhaust flange	Extraction efficiency for N2	Installation direction
ATH 400M	ISO 100/160	410 l/s	Any
ATH 1300M	ISO 160/200	1250 l/s	Any
ATH 1600M	ISO 200/250	1500 l/s	Any
ATH 2300M	ISO 250	2100 l/s	Any

Recommend

MDP Series

High exhaust pressure up to 40 mbar

Adixen - Pascal Series

adixen Vacuum Products have committed 30 years of experience in Product Design and Manufacturing to meet industry requirements for High Performance, Quality, and Reliability ... and the result is their famous Pascal Range of Rotary Vane Pumps.

Drytel Series

Drytel 1025
7.5~30 l/s pumping system

ADP ADS SERIES TWO

Low energy consumption and high reliability
Suitable for semiconductor and harsh manufacturing processes
Pumping rate: 112~1700 m3/h
Ultimate pressure: 6 × 10-3 mbar