Rotary Vane Pumps
Adixen - Pascal Series
adixen Vacuum Products have committed 30 years of experience in Product Design and Manufacturing to meet industry requirements for High Performance, Quality, and Reliability ... and the result is their famous Pascal Range of Rotary Vane Pumps.
Recommend
adixen ACP 15/28/40
Main application industries:
- Semiconductor industry
- Panel industry
- Continuous vacuum coating industry
- Solar power industry
- Light emitting diode industry
- Biotechnology Pharmaceutical Industry
Roots Vacuum Pump Air Extraction System
With various pre-pumps, the working range can be extended to medium vacuum or even high vacuum areas.
Greater pumping rates are achieved at low pressures.
Pumping rate: 150~300~600~1000~2000 m3/h
ATH-M Series
ATH 400M, ATH1300M ,ATH1600M,ATH2300M
300~2100 l/s pumping speed design
Brand new maglev five-way horizontal & N2 purge & Heater design
Applicable to PVD, CVD, Etch processes
ADP ADS SERIES TWO
Low energy consumption and high reliability
Suitable for semiconductor and harsh manufacturing processes
Pumping rate: 112~1700 m3/h
Ultimate pressure: 6 × 10-3 mbar