ACP120

Main application industries:

• Semiconductor industry
• Panel industry
• Continuous vacuum coating industry
• Solar power industry
• Light emitting diode industry
• Biotechnology Pharmaceutical Industry

High exhaust pressure up to 40 mbar

With various pre-pumps, the working range can be extended to medium vacuum or even high vacuum areas.

Greater pumping rates are achieved at low pressures.

Pumping rate: 150~300~600~1000~2000 m3/h

Drytel 1025
7.5~30 l/s pumping system

Low energy consumption and high reliability
Suitable for semiconductor and harsh manufacturing processes
Pumping rate: 112~1700 m3/h
Ultimate pressure: 6 × 10-3 mbar

low running costs
Low noise and low vibration
Pumping rate 14 ~ 37 m3/h
Ultimate pressure 3×10-2mbar